N'afọ 2020, e mepụtara ihe karịrị otu puku ijeri ibe n'ụwa niile, nke ruru ibe 130 nke onye ọ bụla nọ n'ụwa nwere ma jiri ya.N'agbanyeghị nke ahụ, ụkọ mgbawa na-adịbeghị anya gara n'ihu na-egosi na ọnụọgụ a erubeghị oke ya.
Ọ bụ ezie na enwere ike ịmepụta ibe n'ụdị buru ibu, imepụta ha abụghị ọrụ dị mfe.Usoro nke imepụta ibe dị mgbagwoju anya, taa, anyị ga-ekpuchi usoro isii kachasị mkpa: ntinye, mkpuchi fotoresisist, lithography, etching, implantation ion, na nkwakọ ngwaahịa.
Ntinye ego
Nzọụkwụ nkwụnye ego na-amalite site na wafer, nke a na-ebipụ na 99.99% silicon cylinder dị ọcha (nke a na-akpọkwa "silicon ingot") ma na-egbuke egbuke ka ọ dị mma nke ọma, mgbe ahụ, a na-edobe ihe nkiri dị mkpa nke onye nduzi, insulator, ma ọ bụ ihe semiconductor. n'elu wafer, dabere na ihe nhazi chọrọ, nke mere na oyi akwa mbụ nwere ike ibipụta na ya.A na-akpọkarị nzọụkwụ a dị mkpa dị ka "deposition".
Ka ibe ibe na-adị ntakịrị ma na-adị ntakịrị, usoro obibi akwụkwọ na wafer na-aghọwanye mgbagwoju anya.Ọganihu na ntinye ego, etching na lithography bụ isi ihe na-eme ka ibe ya dị ntakịrị ma si otú a na-eme ka ọ na-aga n'ihu nke Iwu Moore.Nke a na-agụnye usoro ọhụrụ nke na-eji ihe ọhụrụ eme ka usoro nkwụnye ego bụrụ nke ziri ezi.
mkpuchi mkpuchi fotoresisist
A na-ejizi ihe na-ese foto nke a na-akpọ "photoresist" (nke a na-akpọkwa "photoresist") na-ekpuchi wafers.Enwere ụdị abụọ nke photoresists - "photoresists ziri ezi" na "photoresists na-adịghị mma".
Isi ihe dị iche n'etiti ndị na-ese foto dị mma na ndị na-adịghị mma bụ usoro kemịkalụ nke ihe na ụzọ photoresist si emeghachi omume na ìhè.N'ihe banyere fotoresists dị mma, ebe a na-ekpughere ìhè UV na-agbanwe usoro ma na-aghọwanye ihe soluble, si otú a na-akwadebe ya maka etching na ntinye.Foto ndị na-adịghị mma, n'aka nke ọzọ, polymerize na mpaghara ndị a na-ekpuchi ọkụ, nke na-eme ka ha sie ike igbari.A na-ejikarị photoresists eme ihe na mmepụta semiconductor n'ihi na ha nwere ike nweta mkpebi dị elu, na-eme ka ha bụrụ nhọrọ kacha mma maka ọkwa lithography.E nwere ugbu a ọtụtụ ụlọ ọrụ gburugburu ụwa na-emepụta photoresists maka mmepụta semiconductor.
Fotolithography
Photolithography dị oké mkpa na usoro n'ichepụta mgbawa n'ihi na ọ na-ekpebi otú obere transistor na mgbawa nwere ike ịbụ.N'oge a, a na-etinye wafers n'ime igwe fotolithography ma na-ekpuchi ya na ìhè ultraviolet miri emi.Ọtụtụ oge, ha na-adị ntakịrị puku ugboro karịa otu ọka ájá.
A na-atụnye ọkụ n'elu wafer site na "efere nkpuchi" na lithography optics (lens nke usoro DUV) na-agbada ma na-elekwasị anya na usoro sekit a haziri na efere nkpuchi na fotoresisist na wafer.Dịka akọwara na mbụ, mgbe ọkụ dakwasịrị fotoresist, mgbanwe kemịkalụ na-apụta nke na-etinye ụkpụrụ na efere nkpuchi na mkpuchi fotoresist.
Inweta ụkpụrụ nke ekpughere nke ọma bụ ọrụ dị egwu, yana nnyonye anya urughuru, mgbagha na ntụpọ anụ ahụ ma ọ bụ kemịkal ndị ọzọ ga-ekwe omume na usoro a.Ọ bụ ya mere na mgbe ụfọdụ anyị kwesịrị ịkwalite ụkpụrụ ikpughe ikpeazụ site n'imezigharị ụkpụrụ na nkpuchi ahụ kpọmkwem iji mee ka ụkpụrụ e biri ebi dị ka anyị chọrọ ka ọ dị.Usoro anyị na-eji “lithography computational” iji jikọta ụdị algorithmic na data sitere na igwe lithography wee nwalee wafers iji mepụta ihe nkpuchi nke dị iche kpamkpam na usoro ikpughe ikpeazụ, mana nke ahụ bụ ihe anyị chọrọ inweta n'ihi na ọ bụ naanị ụzọ isi nweta ya. ụkpụrụ ikpughe chọrọ.
Etching
Nzọụkwụ ọzọ bụ iwepu fotoresisist rụrụ arụ iji kpughee ụkpụrụ achọrọ.N'oge usoro "etch", a na-asa wafer ma mepụta ya, a na-asachakwa ụfọdụ n'ime ndị na-ese foto iji kpughee usoro 3D mepere emepe.Usoro etching ahụ ga-etolite n'ụzọ ziri ezi na mgbe niile n'emebighị nguzosi ike n'ezi ihe na nkwụsi ike nke nhazi mgbawa.Usoro etching dị elu na-enye ndị na-emepụta mgbawa aka iji ụkpụrụ nwere okpukpu abụọ, okpukpu anọ na nke oghere iji mepụta obere akụkụ nke atụmatụ mgbawa ọgbara ọhụrụ.
Dị ka photoresists, etching na-ekewa n'ime "akọrọ" na "mmiri" ụdị.Etching akọrọ na-eji gas kọwaa ụkpụrụ ekpughere na wafer.Wet etching na-eji ụzọ kemịkal ihicha wafer.
Otu mgbawa nwere ọtụtụ ọkwa, yabụ a ga-ejikwa nlezianya chịkwaa etching ka ọ ghara imebi n'okpuru ala nke nhazi mgbawa ọtụtụ oyi akwa.Ọ bụrụ na ebumnuche etching bụ ịmepụta oghere na nhazi ahụ, ọ dị mkpa iji hụ na omimi nke oghere ahụ ziri ezi.Ụfọdụ atụmatụ mgbawa nwere ihe ruru ọkwa 175, dị ka 3D NAND, na-eme ka nzọụkwụ etching dị mkpa ma sie ike.
Ịgba ọgwụ ion
Ozugbo etinyere ụkpụrụ ahụ n'elu wafer ahụ, a na-eji ion dị mma ma ọ bụ nke na-adịghị mma na-agbanye wafer ahụ iji mezie njirimara na-eduzi nke akụkụ nke ụkpụrụ ahụ.Dị ka ihe maka wafers, silicon raw material abụghị ihe mkpuchi zuru oke ma ọ bụ onye nduzi zuru oke.Ngwongwo na-eduzi silicon na-adaba ebe n'etiti.
Na-eduzi ion ebubo n'ime kristal silicon ka e wee nwee ike ịchịkwa ọkụ eletrik iji mepụta ọkụ eletrik bụ isi ihe mgbawa, transistors, bụ "ionization", nke a makwaara dị ka "ion implantation".Mgbe ionized oyi akwa ahụ, a na-ewepụ fotoresist fọdụrụnụ nke a na-eji echebe ebe a na-adịghị ahụ anya.
Nkwakọ ngwaahịa
A na-achọ ọtụtụ puku nzọụkwụ iji mepụta mgbawa na wafer, ọ na-ewe ihe karịrị ọnwa atọ iji site na imewe gaa na mmepụta.Iji wepụ ihe mgbawa na wafer, a na-egbutu ya n'ime ibe ọ bụla site na iji diamond diamond.A na-ekewa ibe ndị a, nke a na-akpọ "bare die," site na wafer 12-inch, nke a na-ejikarị eme ihe na semiconductor, na n'ihi na nha nke ibe ahụ dịgasị iche, ụfọdụ wafers nwere ike ịnwe ọtụtụ puku ibe, ebe ndị ọzọ nwere nanị ole na ole. iri na abuo.
A na-etinyekwa wafers ndị a na-enweghị ihe ọ bụla na "substrate" - mkpụrụ nke na-eji foil ígwè na-eduzi ntinye na ntinye akara site na wafer efu gaa na usoro ndị ọzọ.Mgbe ahụ, a na-ekpuchi ya na "mmiri ọkụ", obere ihe nchekwa igwe dị larịị nwere ihe mkpuchi iji hụ na mgbawa ahụ na-adị jụụ mgbe a na-arụ ọrụ.
Nkọwapụta Ụlọ ọrụ
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Oge nzipu: Eprel-24-2022